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Onto Innovation
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Updated Aug 10, 2026
Onto Innovation completes $720M minority stake acquisition in Rigaku Holdings for X-ray process control expansion
Onto Innovation closed its acquisition of a 27% equity stake in Rigaku Holdings Corporation for $720 million on August 10, 2026. The investment formalizes a strategic collaboration announced in April 2026 and reflects Onto's pivot toward next-generation X-ray-based process control solutions for semiconductor manufacturing as customers adopt more complex 3D architectures and exotic materials. Onto will account for the investment under the fair value option method without consolidating Rigaku's results and will nominate one director to Rigaku's board.
Tone: bullishRevenue
$1B
ONTO 10-K · FY 2026
Employees
1,615
Revenue FY2024
$987.3M
Headquarters
Wilmington, MA
Profile
ONTO 10-K Item 1 · Feb 24, 2026Onto Innovation is a semiconductor process control company that designs, manufactures, and supports metrology, inspection, and lithography systems used by wafer manufacturers, IC fabricators, and advanced packaging manufacturers. Its product portfolio spans optical critical dimension metrology, macro-defect inspection, packaging lithography, thin film measurement, and process control software. The company serves both front-end wafer processing and back-end advanced packaging markets globally.
Read filing description ↓ Collapse description ↑
Onto Innovation is a worldwide leader in the design, development, manufacture and support of metrology and inspection tools for the semiconductor industry, including process control tools that perform optical metrology and inspection on patterned and unpatterned wafers, including macro defect inspection of both 2D and 3D wafer features, wafer substrate and panel substrate lithography systems, and process control analytical software. Our products are primarily used by silicon wafer manufacturers, semiconductor integrated circuit ('IC') fabricators, and advanced packaging manufacturers operating in the semiconductor market. Our products are also used for process control in a number of other specialty device manufacturing markets, including light emitting diodes ('LED'), vertical-cavity surface-emitting lasers ('VCSEL'), micro-electromechanical systems ('MEMS'), CMOS image sensors ('CIS'), silicon and compound semiconductor (SiC and GaN) power devices, analog devices, RF filters, data storage, and certain industrial and scientific applications. We provide process and yield management solutions used in bare silicon wafer production and wafer processing facilities, often referred to as 'front-end' manufacturing, and advanced packaging of chips and test facilities, or 'back-end' manufacturing, through a portfolio of standalone systems for optical metrology, macro-defect inspection, packaging lithography, as well as transparent and opaque thin film measurements. Our automated and integrated metrology systems measure critical dimensions, device structures, topography, shape, and various thin film compositions, including three-dimensional features and film thickness, as well as optical and material properties.
Primary products
- Atlas family (OCD and thin film metrology, wafer stress metrology)
- AI Diffract software
- SpectraProbe software
- AiGen X scalable computing engine
- IMPULSE family (integrated metrology)
- NovusEdge inspection tool
Business segments
End markets
Geographies
Named competitors
“We believe that our competitive position in each of our markets is based on the ability of our products and services to address customer requirements related to numerous competitive factors.” Competitive position, as stated in the filing
Revenue commentary · FY 2026
Revenue increased 2% in fiscal 2025 compared to fiscal 2024, driven by higher NAND and OSAT customer sales and contribution from the acquired Semilab USA business, partially offset by lower Foundry and DRAM sales.
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